| Title | In situ laser beam probes for semiconductor processing |
| Publication Type | Book Chapter |
| Year of Publication | 1995 |
| Authors | Gu, G, Li, H, Cook, J, Ogryzlo, EA |
| Editor | Misaelides, P |
| Book Title | Application of Particle and Laser Beams in Materials Technology |
| Series Title | Nato Advanced Science Institutes Series, Series E, Applied Sciences |
| Volume | 283 |
| Pagination | 259-267 |
| Publisher | Kluwer Academic Publ |
| City | Dordrecht |
| ISBN Number | 0168-132X0-7923-3324-1 |
| URL | <Go to ISI>://A1995BE41L00016 |
