@inbook {3349,
	title = {In situ laser beam probes for semiconductor processing},
	booktitle = {Application of Particle and Laser Beams in Materials Technology},
	series = {Nato Advanced Science Institutes Series, Series E, Applied Sciences},
	volume = {283},
	year = {1995},
	note = {ISI Document Delivery No.: BE41LTimes Cited: 0Cited Reference Count: 0Proceedings PaperNATO Advanced Study on Application of Particle and Laser Beams in Materials TechnologyMAY 08-21, 1994KALLITHEA, GREECENATO Sci \& Environm Affairs DivPO BOX 17, 3300 AA DORDRECHT, NETHERLANDS},
	pages = {259-267},
	publisher = {Kluwer Academic Publ},
	organization = {Kluwer Academic Publ},
	address = {Dordrecht},
	isbn = {0168-132X0-7923-3324-1},
	url = {<Go to ISI>://A1995BE41L00016},
	author = {Gu, G. and Li, H. and Cook, J. and Ogryzlo, E. A.},
	editor = {Misaelides, P.}
}
