Research & Teaching Faculty

Default Header Image

Resistivity-microstructure correlation of self-annealed electrodeposited copper thin films

TitleResistivity-microstructure correlation of self-annealed electrodeposited copper thin films
Publication TypeJournal Article
Year of Publication2012
AuthorsAlshwawreh, N, Militzer, M, Bizzotto, D, Kuo, JC
JournalMicroelectronic Engineering
Volume95
Pagination26–33
Date Publishedjul