Title | Resistivity-microstructure correlation of self-annealed electrodeposited copper thin films |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Alshwawreh, N, Militzer, M, Bizzotto, D, Kuo, JC |
Journal | Microelectronic Engineering |
Volume | 95 |
Pagination | 26–33 |
Date Published | jul |