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DEPOSITION OF DIAMOND-LIKE FILMS BY LASER ABLATION

TitleDEPOSITION OF DIAMOND-LIKE FILMS BY LASER ABLATION
Publication TypeJournal Article
Year of Publication1990
AuthorsMehta, BR, Ogryzlo, EA
JournalSurface & Coatings Technology
Volume43-4
Pagination80-87
Date PublishedDec
Type of ArticleProceedings Paper
ISBN Number0257-8972
KeywordsGROWTH
Abstract

Diamond-like carbon films were grown by laser ablation of graphite and Lucite targets with a KrF excimer laser. The films were analysed using scanning electron microscopy, Auger spectroscopy and Raman spectroscopy. The use of Lucite targets results in higher and more constant growth rates as well as the absence of "splashing", which is observed to introduce structural defects in the growing film when graphite is used as a target. Auger and Raman analyses show the presence of diamond-like phases in these films.

URL<Go to ISI>://A1990EP99500011