Performance Features
- Field emission electron source with high beam current density and high spatial resolution (7 nm for SEM and 12 nm for SAM)
- 150 mm radius hemispherical energy analyzer with high energy resolution (0.02%)
- Scanning Electron Microscopy (SEM)
- Auger Electron Spectroscopy (AES)
- Scanning Auger Microscope (SAM)
- Differentially-pumped Ar+ gun for depth profiling and sample cleaning
- Motorized 5-axis manipulator for angle dependent AES measurement and depth profiling under sample rotation
- Energy Dispersive X-ray Microanalysis (EDX)
- Reflected Electron Energy Loss Spectroscopy (REELS)
- In-situ sample heating/fracturing
- Backscattered Electron Detector (BSD)
Typical Analytical Applications
- Surface analysis (SEM/AES/SAM) of small areas (spatial resolution < 100 nm)
- Auger line scan analysis
- Elemental mapping
- Elemental depth profiling
- Non-destructive depth profiling by Angle Dependent Auger Electron Spectroscopy (ADAES)
- Simultaneous surface analysis (with AES) and bulk analysis (with EDX)
- REELS analysis for distinguishing different forms of a material (e.g. graphite, diamond & amorphous carbon; n- & p-type Si)