Export 1 results:
Filters: Keyword is SILICON DIOXIDE  [Clear All Filters]
1995
Cook, J. G. ; Lebrun, L. ; Li, Z. M. ; Ogryzlo, E. A. Characterization Of A Radiofrequency Discharge Used For Downstream Plasma Oxidation Of Si. Journal of Applied Physics 1995, 77, 1690-1695.