@article {3425,
	title = {XPS INVESTIGATIONS OF THE INTERACTIONS OF HYDROGEN WITH THIN-FILMS OF ZIRCONIUM-OXIDE .2. EFFECTS OF HEATING A 26-ANGSTROM THICK-FILM AFTER TREATMENT WITH A HYDROGEN PLASMA},
	journal = {Applied Surface Science},
	volume = {89},
	number = {3},
	year = {1995},
	note = {ISI Document Delivery No.: RG147Times Cited: 32Cited Reference Count: 19},
	month = {Jul},
	pages = {263-269},
	type = {Article},
	abstract = {In order to help establish the role hydrogen plays in the oxidation and reduction of zirconium oxide thin films, XPS was used to study the effects of heating a 26 Angstrom thick ZrO2 film after a hydrogen-plasma treatment. The latter treatment produced a uniform hydrogen-trapped ZrO2 film. Heating to 425 degrees C yielded a reduced suboxide, ZrOx, particularly in the deeper regions of the film, but near the surface this heating produced a zirconium state with Zr3d(5/2) binding energy at 183.4 eV, which is higher than that of ZrO2 by about 0.5 eV. This new chemical state of zirconium appears especially related to Zr-OH bonding. This result, with the observed inhomogeneity of the film, strongly suggests that either H2O or OH- species migrate to the surface region of the hydrogen-trapped ZrO2 film during the heating process.},
	keywords = {AES, EELS, SPECTRA, ZRO2},
	isbn = {0169-4332},
	url = {<Go to ISI>://A1995RG14700006},
	author = {Li, Y. S. and Wong, P. C. and Mitchell, K. A. R.}
}
