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Recrystallization of Electrodeposited Copper Thin Films During Annealing

TitleRecrystallization of Electrodeposited Copper Thin Films During Annealing
Publication TypeJournal Article
Year of Publication2010
AuthorsAlshwawreh, N, Militzer, M, Bizzotto, D
JournalJournal of Electronic Materials
Volume39
Pagination2476 - 2482
Date Published11/2010
ISSN1543-186X
DOI10.1007/s11664-010-1342-x