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CHARACTERIZATION OF AN ATMOSPHERIC-PRESSURE PARALLEL-PLATE CAPACITIVELY COUPLED RADIOFREQUENCY PLASMA

TitleCHARACTERIZATION OF AN ATMOSPHERIC-PRESSURE PARALLEL-PLATE CAPACITIVELY COUPLED RADIOFREQUENCY PLASMA
Publication TypeJournal Article
Year of Publication1991
AuthorsHuang, DG, Blades, MW
JournalApplied Spectroscopy
Volume45
Pagination1468-1477
Date PublishedNov
Type of ArticleArticle
ISBN Number0003-7028
KeywordsARGON, ATOMIC EMISSION SPECTROSCOPY, capacitively coupled plasma, CHLORINE, DETECTOR, EXCITATION, GAS-CHROMATOGRAPHIC, HELIUM PLASMA, MICROWAVE-INDUCED PLASMA, NEAR-INFRARED EMISSION, NONMETAL ATOMIC EMISSION, RED, SPECTRA, SPECTROMETRY
Abstract

A new design for a radio-frequency, atmospheric-pressure, parallel-plate capacitively coupled plasma (CCP) which uses water-cooled electrodes is described. Four different sizes of quartz tubes were compared with respect to spatial emission features for support gas and analyte species. Torches studied had the following inside dimensions: a 1-mm capillary tube with round cross section, a 2 x 4 mm tube, a 4 x 4 mm tube, and a 6 x 6 mm tube. Relative emission intensities of near-infrared lines for F, Cl, Br, I, C, N, and O atomic and ionic lines excited with the use of the He-CCP are tabulated. The detection limits range from 10 to 78 pg/s.

URL<Go to ISI>://A1991GR64600012